JPS6454329U - - Google Patents
Info
- Publication number
- JPS6454329U JPS6454329U JP14962187U JP14962187U JPS6454329U JP S6454329 U JPS6454329 U JP S6454329U JP 14962187 U JP14962187 U JP 14962187U JP 14962187 U JP14962187 U JP 14962187U JP S6454329 U JPS6454329 U JP S6454329U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- region
- compound semiconductor
- film forming
- reaction chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14962187U JPS6454329U (en]) | 1987-09-30 | 1987-09-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14962187U JPS6454329U (en]) | 1987-09-30 | 1987-09-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6454329U true JPS6454329U (en]) | 1989-04-04 |
Family
ID=31422017
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14962187U Pending JPS6454329U (en]) | 1987-09-30 | 1987-09-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6454329U (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7632093B2 (en) | 2004-09-06 | 2009-12-15 | Samsung Electronics Co., Ltd. | Pyrolysis furnace having gas flowing path controller |
-
1987
- 1987-09-30 JP JP14962187U patent/JPS6454329U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7632093B2 (en) | 2004-09-06 | 2009-12-15 | Samsung Electronics Co., Ltd. | Pyrolysis furnace having gas flowing path controller |